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Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

Article DOI: 10.3791/61056-v • 06:40 min • January 28th, 2021
January 28th, 2021 •
1,2, 1,2, 1,2, 1,2, 1,2, 1,2, 1,2
1The School of Physics and Astronomy, Tel Aviv University, 2Tel Aviv University Center for Light-Matter Interaction

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Summary
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A protocol is presented for automated irradiation of thin gold foils with high intensity laser pulses. The protocol includes a step-by-step description of the micromachining target fabrication process and a detailed guide for how targets are brought to the laser's focus at a rate of 0.2 Hz.

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Automated Delivery Microfabricated Targets Intense Laser Irradiation Experiments Slow Shot Rates Target System Data Collection Target Parameters Radiation Dose Wafer Fabrication Process Target Alignment Process Engineer Nirit Porecki Shamay Nofar Livni High Stress Silicon Wafer One-zero-zero Crystal Formation Silicon Nitride Coating Acetone Isopropanol HMDS Resists AZ 1518 Positive Photoresist Bake At 100 Degrees Celsius Photolithograph UV Lamp Exposure Overall Fluence AZ 726 Developer
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