Jürgen Gluch

Fraunhofer Institute for Ceramic Technologies and Systems

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その場での透過型電子顕微鏡での時間依存絶縁破壊:マイクロエレクトロニクスデバイスの故障メカニズムを理解することが可能

1Fraunhofer Institute for Ceramic Technologies and Systems, 2Dresden Center for Nanoanalysis, Technische Universität Dresden, 3Globalfoundries Fab 8, 4Globalfoundries Fab 1

 Engineering