Oliver Aubel

Globalfoundries Fab 1

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Publications

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In Situ Zeitabhängige Dielectric Breakdown im Transmissionselektronenmikroskop: eine Möglichkeit, die Fehlermechanismus in mikroelektronischen Bauelementen Verstehen

1Fraunhofer Institute for Ceramic Technologies and Systems, 2Dresden Center for Nanoanalysis, Technische Universität Dresden, 3Globalfoundries Fab 8, 4Globalfoundries Fab 1

 Engineering