National Center for High-Performance Computing 1 article published in JoVE Engineering Probing C84-embedded Si Substrate Using Scanning Probe Microscopy and Molecular Dynamics Mon-Shu Ho1, Chih-Pong Huang2, Jyun-Hwei Tsai3, Che-Fu Chou1, Wen-Jay Lee3 1Department of Physics and Institute of Nanoscience, National Chung Hsing University, 2Metallurgy Section, Materials & Electro-Optics Research Division, National Chung-Shan Institute of Science and Technology, 3National Center for High-Performance Computing This paper reports the nanomaterial fabrication of a fullerene Si substrate inspected and verified by nanomeasurements and molecular dynamic simulation.