Lukasiewicz Research Network-Institute of Electronic Materials Technology

1 article published in JoVE

• Chemistry

  
  3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry Paweł Piotr Michałowski¹, Sebastian Zlotnik¹, Iwona Jóźwik¹, Adrianna Chamryga¹, Mariusz Rudziński^{1 1}Łukasiewicz Research Network-Institute of Electronic Materials Technology The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.