1Department of Electrical and Computer Engineering, University of California, Davis, 2Department of Chemical Engineering and Materials Science, University of California, Davis, 3Department of Biomedical Engineering, University of California, Davis
The fabrication of BioMEMs devices is often done using a microfabrication technique called photolithography. This widely used method utilizes light to transfer a pattern onto a silicon wafer, and provides the basis for the fabrication of many types of BioMEMs devices.
This video presents the photolithography technique, shows how the process is…
1Institute for Biological Interfaces, Karlsruhe Research Centre, 2Institute for BioMedical Technology, University of Twente, 3Department of Materials Research, Institute for Heavy Ion Research, 4Institute of Microstructure Technology, Karlsruhe Research Centre, 5Institute for Micro Process Engineering, Karlsruhe Research Centre
1ISRC/ASRI, Department of Electrical and Computer Engineering, Seoul National University, 2Quantum Tech. Lab, SK Telecom
1Laboratory of Cell Physics, Institut de Science et d'Ingénierie Supramoléculaires (ISIS), CNRS and Université de Strasbourg, 2Development and Stem Cells Program, Institut de Génétique et de Biologie Moléculaire et Cellulaire (IGBMC), CNRS and Université de Strasbourg
1Department of Biomedical Engineering, University of Delaware, 2Department of Electrical and Computer Engineering, University of Houston, 3Delaware Biotechnology Institute
1Division of Engineering, New York University Abu Dhabi (NYUAD), 2Department of Chemical and Biomolecular Engineering, New York University Tandon School of Engineering, 3Newomics, Inc., 4Department of Electrical Engineering and Computer Science, Department of Biological Engineering, MIT
1Molecular Engineering Laboratory, Biomedical Sciences Institute, Agency for Science Technology and Research, 2Department of Biomedical Engineering, Columbia University
1Mechanical Engineering and Materials Science, Duke University, 2Huacells Corp
1Mechanobiology Institute (MBI), National University of Singapore
1Materials Engineering Division, Lawrence Livermore National Laboratory, 2Department of Biomedical Engineering, Boston University
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign
1Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 2Department of Information Engineering, University of Florence, 3Department of Engineering, Roma Tre University, 4FTMTR&D/SPA, STMicroelectronics, 5Brain Connectivity Center, BCC, Istituto Neurologico Nazionale Fondazione C. Mondino I.R.C.C.S., 6Department of Molecular Medicine - Unit of Pathology, University of Pavia, Foundation IRCCS Policlinico San Matteo
1Department of Mechanical and Nuclear Engineering, Virginia Commonwealth University, 2Center for Rehabilitation Science and Engineering, Virginia Commonwealth University, 3Massey Cancer Center, Virginia Commonwealth University
1School of Electrical Engineering & Telecommunications, University of New South Wales, 2QCD Labs, COMP Centre of Excellence, Department of Applied Physics, Aalto University
1Chemical and Biological Engineering, Princeton University, 2Molecular Biology, Princeton University
1Department of Biomedical Engineering, School of Medicine, Tsinghua University, 2Collaborative Innovation Center for Diagnosis and Treatment of Infectious Diseases, 3School of Life Sciences, Tsinghua University
1Center for Nanoparticle Research, Institute for Basic Science (IBS), 2School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University, 3Department of Mechanical Engineering, Hanyang University
1Mechanosynthesis Group, Department of Mechanical Engineering, University of Michigan, 2IMEC, Belgium
1Materials Sciences Division, Lawrence Berkeley National Laboratory
1Department of Bioengineering, Stanford University
1Electrical Engineering Department, Polytechnique Montreal
1NSF Research Triangle Materials Research Science and Engineering Center, Duke University, 2Department of Biomedical Engineering, Duke University, 3Department of Mechanical Engineering and Materials Science, Duke University
1MEMS Sensors and Actuators Laboratory (MSAL), Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, 2Institute for Bioscience and Biotechnology Research, Fischell Department of Bioengineering, University of Maryland
1Department of Cellular and Molecular Physiology, College of Medicine, Penn State University, 2Lane Department of Computer Science and Electrical Engineering, West Virginia University
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology
1School of Electrical and Computer Engineering, Georgia Institute of Technology, 2Institute of Electronics and Nanotechnology, Georgia Institute of Technology, 3Petit Institute for Bioengineering and Biosciences, Georgia Institute of Technology
1Department of Biomedical Engineering, The University of Texas at Austin, 2Wyss Institute for Biologically Inspired Engineering at Harvard University, 3Vascular Biology Program, Boston Children's Hospital, Harvard Medical School, 4John A. Paulson School of Engineering and Applied Sciences, Harvard University
1Centre for Integrative Physiology, School of Biomedical Sciences, The University of Edinburgh, 2Edinburgh Cancer Research Centre, Institute of Genetics and Molecular Medicine, Western General Hospital, 3School of Engineering, Institute for Integrated Micro and Nano Systems, The University of Edinburgh
1Physical Sciences Division, Pacific Northwest National Laboratory
1Lane Department of Computer Science and Electrical Engineering, West Virginia University, 2Department of Cell Biology and Neuroscience, University of California at Riverside
1John A. Paulson School of Engineering and Applied Sciences, Harvard University, 2Department of Chemistry and Chemical Biology, Harvard University, 3Department of Physics, Korea University
1Department of Pediatrics, Emory University School of Medicine, 2Wallace H. Coulter Department of Biomedical Engineering, Georgia Institute of Technology and Emory University, 3Aflac Cancer Center and Blood Disorders Service of Children's Healthcare of Atlanta, 4Winship Cancer Institute of Emory University
1Laboratoire Physico-Chimie Curie, Institut Curie, Institut Pierre-Gilles de Gennes pour la microfluidique, Université PSL, CNRS, 2UMR 144 Institut Curie, Université PSL, CNRS
1Department of Bioelectronics, Ecole Nationale Supérieure des Mines de Saint-Étienne, CMP-EMSE, MOC, 2Graduate School of Frontier Sciences, The University of Tokyo
1Institute of Bio- and Geosciences, IBG-1: Biotechnology, Forschungszentrum Juelich GmbH
1Department of Molecular, Cellular and Developmental Biology, University of Michigan, 2Department of Biomedical Engineering, University of Michigan, 3Life Sciences Institute, University of Michigan, 4Department of Cell and Developmental Biology, University of Michigan, 5Department of Mechanical Engineering, University of Michigan
1Department of Materials Science and Engineering, University of Sheffield, 2Department of Chemistry, University of Sheffield, 3L. V. Prasad Eye Institute
1Materials Engineering Division, Lawrence Livermore National Laboratory, 2UCSF Center for Integrative Neuroscience and the Department of Physiology, University of California, San Francisco
1Department of Chemical Engineering, University of Utah, 2Huntsman Cancer Institute, University of Utah
1Department of Electrical and Computer Engineering, University of Minnesota, 2Department of Biomedical Engineering, University of Minnesota, 3Department of Neurology, Mayo Clinic College of Medicine, 4Department of Immunology, Mayo Clinic College of Medicine
1Materials Science and Technology Division, US Naval Research Laboratory, 2American Society for Engineering Education—Naval Research Laboratory (ASEE-NRL), 3Leidos Corporation
1Department of Biological Engineering, Massachusetts Institute of Technology, 2Environmental Toxicology, Chulabhorn Graduate Institute, 3Department of Biomedical Engineering, University of Minnesota
1Department of Aerospace and Mechanical Engineering, Bioengineering Graduate Program, University of Notre Dame, 2Division of Electrical and Computer Engineering, Louisiana State University
1Bredesen Center, University of Tennessee, Knoxville, 2Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, 3Department of Materials Science and Engineering, University of Tennessee, Knoxville
1Fischell Department of Bioengineering, University of Maryland, 2Institute for Bioscience and Biotechnology Research, University of Maryland, 3Department of Materials Science and Engineering, University of Maryland
1Department of Chemical Engineering, Michigan Technological University, 2Department of Mechanical Engineering, Michigan Technological University, 3XG Sciences, Inc.
1Center for Biomedical Engineering,, Brown University
1Department of Microbiology and Molecular Genetics, Oklahoma State University, 2Department of Molecular and Cellular Biology, Harvard University
1Lee Kong Chian School of Medicine, Nanyang Technological University, 2School of Chemical and Biomedical Engineering, Nanyang Technological University, 3NTU-Northwestern Institute of Nanomedicine, Nanyang Technological University
