Materials
| Name | Company | Catalog Number | Comments |
| Lumerical FDTD | Lumerical | ||
| Silicon wafer | IDB technologies | Single sided polished | |
| Plassys 450 MEB evaporator | Plassys Bestek | ||
| VM651 Primer | Dupont | ||
| PI2545 | Dupont | ||
| Methyl Isobutyl Ketone | Sigma-Aldrich | ||
| Isopropanol | Sigma-Aldrich | ||
| Plasmaprep5 barrel Asher | Gala Instrumente | ||
| VB6 UHR EWF electron beam writer | Vistec | ||
| Tanner L-Edit | Tanner Inc. | ||
| Layout Beamer | GenISys Inc. | ||
| Polymethyl methacrylate (PMMA) | Sigma-Aldrich | 293261 Sigma-Aldrich | |
| IFV 66v/s FTIR | Bruker | ||
| Pike 30spec reflection unit | Pike Technologies | ||
| Hg arc lamp | Bruker | ||
| Au mirror | Thor Labs | PF05-03-M01 | |
| Leica INM20 Optical Microscope | Leica microsystems | ||
| 6 mm Mylar Beamsplitter | Bruker |
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