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Fabbricazione di ossidi complessi spazialmente confinati
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Fabbricazione di ossidi complessi spazialmente confinati

Article DOI: 10.3791/50573 • 08:45 min
July 1st, 2013 •
1,2, 1
1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

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July 1st, 2013

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Descriviamo l'uso di deposizione a laser pulsato (PLD), fotolitografia e tecniche di wire-bonding per creare micrometro scala complessi dispositivi di ossidi. La PLD è utilizzato per crescere film sottili epitassiali. Tecniche di fotolitografia e wire-bonding vengono introdotti per creare dispositivi pratici per scopi di misurazione.

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