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Journal / Engineering / Micro-murværk til 3D-Additive Micromanufacturing
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Micro-murværk til 3D-Additive Micromanufacturing
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Micro-murværk til 3D-Additive Micromanufacturing

Article DOI: 10.3791/51974-v • 08:45 min • August 1st, 2014
August 1st, 2014 •
1, 1
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

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Dette papir introducerer et 3D-additiv micromanufacturing strategi (såkaldt »mikro-murværk) for fleksibel fremstilling af microelectromechanical-system (MEMS) strukturer og enheder. Denne tilgang indebærer overførsel trykning-baserede samling af mikro / nanoskala materialer i forbindelse med hurtige termiske annealing-aktiveret materiale bonding teknikker.

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Fysik Micro-murværk mikroapplikationer overførsel trykning tørre lim additiv fremstilling trykte processer microfabrication blæk microelectromechanical systemer (MEMS)
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