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Journal / Engineering / Micro-mur for 3D Additiv Micromanufacturing
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Micro-mur for 3D Additiv Micromanufacturing
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Micro-mur for 3D Additiv Micromanufacturing

Article DOI: 10.3791/51974-v • 08:45 min • August 1st, 2014
August 1st, 2014 •
1, 1
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

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Denne artikkelen introduserer en 3D additiv Micromanufacturing strategi (kalt "micro-mur ') for fleksibel produksjon av mikroelektromekaniske system (MEMS) strukturer og enheter. Denne tilnærmingen innebærer overføring utskrift basert montering av mikro / nanoskala materialer i forbindelse med raske termisk annealing-aktivert materialet bonding teknikker.

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Fysikk Micro-mur microchip overføring utskrift tørre lim additiv produksjon trykte prosesser microfabrication blekk mikroelektromekaniske systemer (MEMS)
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