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JoVE Journal Engineering

투과 전자 현미경에서 제자리 시간에 따른 절연 파괴에

Preparation of Janus Particles and Alternating Current Electrokinetic Measurements with a Rapidly Fabricated Indium Tin Oxide Electrode Array

Journal (Engineering)

Preparation of Janus Particles and Alternating Current Electrokinetic Measurements with a Rapidly Fabricated Indium Tin Oxide Electrode Array

Fabrication and Operation of a Nano-Optical Conveyor Belt

Journal (Engineering)

Fabrication and Operation of a Nano-Optical Conveyor Belt

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투과 전자 현미경에서 제자리 시간에 따른 절연 파괴에 : 가능성은 마이크로 전자 장치의 고장 메커니즘을 이해하기

Article DOI: 10.3791/52447-v • 09:26 min • June 26th, 2015

June 26th, 2015 •

Zhongquan Liao^1,2, Martin Gall¹, Kong Boon Yeap^1,3, Christoph Sander¹, André Clausner¹, Uwe Mühle¹, Jürgen Gluch¹, Yvonne Standke¹, Oliver Aubel⁴, Armand Beyer⁴, Meike Hauschildt⁴, Ehrenfried Zschech^1,2

¹Fraunhofer Institute for Ceramic Technologies and Systems, ²Dresden Center for Nanoanalysis, Technische Universität Dresden, ³Globalfoundries Fab 8, ⁴Globalfoundries Fab 1

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공학 문제 (100) 시간에 따른 절연 파괴 신뢰성 구리 상호 연결 분해 반응 속도, 매우 낮은-K (ULK) 재료

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