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Síntesis y Caracterización de alta eje c ZnO Thin Film por Plasma Enhanced Chemical Vapor Deposition System y su Fotodetector Aplicación UV

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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Ingeniería Número 104 ZnO película delgada, plasma mayor deposición de vapor químico dietilzinc (DEZn) sensor Pt electrodo interdigitada el contacto óhmico fotodetectores UV
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