JoVE Journal
Engineering
Engineering
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低温碳纳米管垂直互连的制作兼容半导体技术
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Article
DOI:
10.3791/53260-v
•
09:20 min
•
December 7th, 2015
低温碳纳米管垂直互连的制作兼容半导体技术
December 7th, 2015
•