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Kompakt Lens-mindre Digital Holografisk mikroskop for MEMS inspeksjon og karakterisering
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Kompakt Lens-mindre Digital Holografisk mikroskop for MEMS inspeksjon og karakterisering

Article DOI: 10.3791/53630-v • 10:28 min • July 5th, 2016
July 5th, 2016 •
1, 1, 1, 2, 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

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Vi presenterer en kompakt refleksjon digital holografisk system (CDHM) for inspeksjon og karakterisering av MEMS enheter. Et objektiv-mindre design ved hjelp av en divergerende innspill bølge gir naturlig geometrisk forstørrelsen er demonstrert. Både statiske og dynamiske studier er presentert.

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Engineering Digital holografi bildesystem kvantitativ fase måling mikroskopi destruktiv testing MEMS
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