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Crescita epitassiale di perovskite titanato di stronzio su Germanio via Atomic Layer Deposition
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Crescita epitassiale di perovskite titanato di stronzio su Germanio via Atomic Layer Deposition

Article DOI: 10.3791/54268-v • 09:45 min • July 26th, 2016
July 26th, 2016 •
1, 1, 1, 1
1McKetta Department of Chemical Engineering, The University of Texas at Austin

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Dettagli Questo lavoro le procedure per la crescita e caratterizzazione di SrTiO cristallina 3 direttamente su substrati germanio per deposizione strato atomico. La procedura illustra la capacità di un metodo di crescita all-chimico per integrare ossidi monoliticamente su semiconduttori per dispositivi a semiconduttore metallo-ossido.

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Chimica Atomic Layer Deposition perovskite titanato di stronzio SrTiO Germanio epitassia ossido cristallino
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