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Epitaxiaal Groei van Perovskite Strontiumtitanaat op Germanium via Atomic Layer Deposition
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Epitaxiaal Groei van Perovskite Strontiumtitanaat op Germanium via Atomic Layer Deposition

Article DOI: 10.3791/54268-v • 09:45 min • July 26th, 2016
July 26th, 2016 •
1, 1, 1, 1
1McKetta Department of Chemical Engineering, The University of Texas at Austin

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Dit werk beschrijft de procedures voor de groei en de karakterisering van kristallijn SrTiO 3 rechtstreeks op germaniumsubstraten door atomic layer deposition. De procedure illustreert het vermogen van een all-chemische groeimethode oxiden monolithisch geïntegreerd op halfgeleiders voor metaal-oxide halfgeleiderinrichtingen.

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Chemie Atomic laag depositie perovskiet strontiumtitanaat SrTiO Germanium epitaxie kristallijnoxide
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