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JoVE Journal Chemistry
Epitaxial Vekst av Perovskite strontium titanate på Germanium via Atomic Layer Nedfall
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Epitaxial Vekst av Perovskite strontium titanate på Germanium via Atomic Layer Nedfall

Article DOI: 10.3791/54268-v • 09:45 min • July 26th, 2016
July 26th, 2016 •
1, 1, 1, 1
1McKetta Department of Chemical Engineering, The University of Texas at Austin

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Dette arbeidet detaljer prosedyrene for vekst og karakterisering av krystallinsk SrTiO tre direkte på germanium underlag ved atom lag deponering. Fremgangsmåten viser evnen til en all-kjemisk vekst metode for å integrere oksyder monolittisk på halvledere for metall-oksyd-halvlederkomponenter.

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Kjemi Atomic lag deponering perovskitt strontium titanate SrTiO Germanium epitaxy krystallinsk oxide
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