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Fabbricazione di sistemi microelettromeccanici a carbonio 3D (C-MEMS)
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Fabbricazione di sistemi microelettromeccanici a carbonio 3D (C-MEMS)

Article DOI: 10.3791/55649-v • 08:01 min • June 17th, 2017
June 17th, 2017 •
1, 1, 1,2, 1,3
1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

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Le microfibre di carbonio vetroso lungo e cavo sono state fabbricate sulla base della pirolisi di un prodotto naturale, capelli umani. Le due fasi di fabbricazione di sistemi microelettromeccanici e di nanoelettromeccanici in carbonio, o C-MEMS e C-NEMS, sono: (i) la fotolitografia di un precursore polimerico ricco di carbonio e (ii) la pirolisi del precursore polimerico modellato.

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Engineering Numero 124 Carbon-MEMS / NEMS carbonio vetroso fabbricazione litografia pirolisi SU8 fotoresist capelli umani.
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