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Fremstilling av 3D-karbon mikroelektromekaniske systemer (C-MEMS)
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Fremstilling av 3D-karbon mikroelektromekaniske systemer (C-MEMS)

Article DOI: 10.3791/55649-v • 08:01 min • June 17th, 2017
June 17th, 2017 •
1, 1, 1,2, 1,3
1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

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Lange og hule glassagtige karbonmikrofiber ble fremstilt basert på pyrolysen av et naturlig produkt, menneskehår. De to fabrikasjonstrinnene av karbonmikroelektromekaniske og karbonnanoelektromekaniske systemer, eller C-MEMS og C-NEMS, er: (i) fotolitografi av en karbonrik polymerprekursor og (ii) pyrolyse av den mønstrede polymerprecursoren.

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Engineering Carbon-MEMS / NEMS glassaktig karbon fabrikasjon litografi pyrolyse SU8 fotoresist menneskehår.
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