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3D Karbon Mikroelektromekanik Sistemlerin (C-MEMS) İmalatı
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3D Karbon Mikroelektromekanik Sistemlerin (C-MEMS) İmalatı

Article DOI: 10.3791/55649-v • 08:01 min • June 17th, 2017
June 17th, 2017 •
1, 1, 1,2, 1,3
1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

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Uzun ve içi boş camsı karbon mikroelyafları, doğal bir ürünün, insan saçının pirolizine dayalı olarak imal edilmiştir. Karbon mikroelektromekanik ve karbon nano elektromekanik sistemlerin veya C-MEMS ve C-NEMS'nin iki üretim aşaması şunlardır: (i) karbon açısından zengin bir polimer öncüsünün fotolitografisi ve (ii) desenli polimer öncüsünün pirolizi.

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Mühendislik Sayı 124 Karbon-MEMS / NEMS camsı karbon imalat litografi piroliz SU8 fotorezist insan saçları.
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