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Aerosol-assisted Chemical Vapor Deposition di strutture in ossido di metallo
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Aerosol-assisted Chemical Vapor Deposition di strutture in ossido di metallo: aste di ossido di zinco

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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Strutture colonnari ossido di zinco in forma di barre sono sintetizzati tramite deposizione di vapore chimico assistita da aerosol senza l'uso di particelle di catalizzatore-seme pre-depositate. Questo metodo è scalabile e compatibile con i vari substrati basati su silicio, quarzo o polimeri.

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Chimica problema 127 ossido di zinco strutture a colonne barre AACVD crescita non catalizzata meccanismo vapore-solido
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