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高效宽量程可调谐 MEMS 滤波器的设计与表征方法
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高效宽量程可调谐 MEMS 滤波器的设计与表征方法

Article DOI: 10.3791/56371-v • 15:25 min • February 4th, 2018
February 4th, 2018 •
1
1Department of Electrical and Electronic Engineering, Harran University

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本文提出了一种利用激光多普勒测 (LDV) 进行固定波束设计的协议, 包括频率调谐的测量、调谐能力的修正以及设备故障和迟滞的避免。LDV 方法在网络分析仪上的优越性是由于其较高的模态能力而表现出来的。

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工程 问题 132 机械系统 (mems) 过滤器 互补金属氧化物半导体 (CMOS)-MEMS 谐振 宽范围主动频率调谐 高模共振 焦耳加热 迟滞 激光多普勒测 (ldv)
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