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Journal / Engineering / 用斜角沉积法制备高吸收介质的超薄彩色薄膜…
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用斜角沉积法制备高吸收介质的超薄彩色薄膜

Article DOI: 10.3791/56383-v • 06:30 min • August 29th, 2017
August 29th, 2017 •
1, 1, 2, 1
1School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, 2Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology

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本文介绍了一种改进的光学涂层超薄型彩色薄膜的制备方法。采用电子束蒸发器的斜角沉积技术可提高色调谐和纯度。利用反射测量和颜色信息转换, 分析了锗和 Au 在 Si 衬底上的制备膜。

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工程 问题 126 光电子 (应用) 电子和电气工程 着色 超薄 薄膜 高吸水性介质 光学涂层 倾斜角沉积
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