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JoVE Journal Engineering
Beredning av stora ytor vertikala 2D Crystal Hetero-strukturer genom Sulfurization övergången metall filmer för enheten Fabrication
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Beredning av stora ytor vertikala 2D Crystal Hetero-strukturer genom Sulfurization övergången metall filmer för enheten Fabrication

Article DOI: 10.3791/56494-v • 08:50 min • November 28th, 2017
November 28th, 2017 •
1,2, 2,3, 1,2, 1,2
1Graduate Institute of Electronics Engineering, National Taiwan University, 2Research Center for Applied Sciences, Academia Sinica, 3Graduate Institute of Photonics and Optoelectronics, National Taiwan University

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Genom sulfurization av pre deponerade övergångsmetaller, kan stora ytor och vertikala 2D hetero-kristallstrukturer fabriceras. Filmen överföra och enheten fabrication förfaranden också visat i detta betänkande.

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Engineering frågan 129 vertikala 2D hetero-kristallstrukturer övergång metall dichalcogenides sulfurization radiofrekvens sputtring film överföra transistorer
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