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Mg3 N2およびZn3N2薄膜の血漿支援分子ビームエピタキシー成長
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Mg3 N2およびZn3N2薄膜の血漿支援分子ビームエピタキシー成長

Article DOI: 10.3791/59415-v • 13:05 min • May 11th, 2019
May 11th, 2019 •
1, 1
1Department of Electrical and Computer Engineering, University of Victoria

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本稿では、窒素源および光学成長モニタリングとしてN2ガスを用いる血漿支援分子ビームエピタキシーによるMgO基板上のMg3N2及びZn3N2のエピタキシャルフィルムの増殖について述べた。

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工学,問題147,プラズマ支援分子ビームエピタキシー,II3-V2半導体,Zn3 N2,Mg3N2,光学増殖モニタリング,金属流出細胞
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