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Journal / Engineering / Plasma-assistert molekylær stråle Epitaxy vekst…
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Plasma-assistert molekylær stråle Epitaxy vekst av mg3n2 og Zn3n2 tynne filmer
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Plasma-assistert molekylær stråle Epitaxy vekst av mg3n2 og Zn3n2 tynne filmer

Article DOI: 10.3791/59415-v • 13:05 min • May 11th, 2019
May 11th, 2019 •
1, 1
1Department of Electrical and Computer Engineering, University of Victoria

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Denne artikkelen beskriver veksten av epitaxial filmer av mg3n2 og Zn3N2 på MGO underlag av plasma-assistert molekylær stråle epitaxy med N2 gass som nitrogen kilde og optisk vekst overvåking.

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Engineering plasma-assistert molekylær stråle epitaxy II3-V2 halvledere Zn3N2 mg3n2 optisk vekst overvåking metall effusjon celler
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