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JoVE Journal Bioengineering
Fokuserad jonstråle litografi till etch nano-arkitekturer i mikroelektroder
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Fokuserad jonstråle litografi till etch nano-arkitekturer i mikroelektroder

Article DOI: 10.3791/60004-v • 13:49 min • January 19th, 2020
January 19th, 2020 •
1, 2,4, 5, 6, 2,3,4
1Department of Electrical Engineering and Computer Science, University of Michigan, 2Veteran Affairs Ann Arbor Healthcare System, 3Department of Neurology, School of Medicine, University of Michigan, 4Department of Biomedical Engineering, University of Michigan, 5Michigan Center for Materials Characterization, University of Michigan, 6Carl Zeiss SMT, Inc.

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Vi har visat att etsning av Nano-arkitektur i intracortical mikroelektrod enheter kan minska den inflammatoriska reaktionen och har potential att förbättra elektrofysiologiska inspelningar. De metoder som beskrivs häri skissera en strategi för etch nano-arkitekturer i ytan av icke-funktionella och funktionella enda skaft kisel intracortical mikroelektroder.

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Bioteknik fokuserad jonstråle litografi intracortical mikroelektroder nano-arkitektur elektrofysiologi neuroinflammation biokompatibilitet
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