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Journal / Engineering / 水を愛するSiO2…
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Engineering

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JoVE Journal Engineering
水を愛するSiO2 /Si/SiO2ウェハーから得られるガス包み込み膜の概念実証
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水を愛するSiO2 /Si/SiO2ウェハーから得られるガス包み込み膜の概念実証

Article DOI: 10.3791/60583-v • 09:39 min • March 1st, 2020
March 1st, 2020 •
1, 1, 1, 1, 2, 2, 1
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division, King Abdullah University of Science and Technology (KAUST), 2Core Labs, King Abdullah University of Science and Technology (KAUST)

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ここでは、集積回路微細加工技術を用いてSiO2/Siウエハースからガス包絡膜(GEM)を実現するための段階的なプロトコルです。シリカ-GEMを水に浸すと、水を使うシリカの組成にもかかわらず、水の侵入が防止されます。

Tags

工学、問題157、水淡水化、直接接触膜蒸留、パーフルオロカーボンフリー膜、フォトリソグラフィ、反応イオンエッチング、湿潤、再入可能な特徴、クロムマスク、バックアライメント、異方性エッチング、蒸気輸送
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