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Tillverkning av Surface Acoustic Wave-enheter på Litium Niobate
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Tillverkning av Surface Acoustic Wave-enheter på Litium Niobate

Article DOI: 10.3791/61013-v • 07:55 min • June 18th, 2020
June 18th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego

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Två tillverkningstekniker, lyft-off och våt etsning, beskrivs i att producera interdigital elektrod givare på en piezoelektrisk substrat, litium niobat, ofta används för att generera ytan akustiska vågor nu hitta bred nytta i mikro till nanoskala fluidik. De som produceras elektroder visas för att effektivt inducera megahertz beställa Rayleigh yta akustiska vågor.

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Engineering acoustofluidiker ytakustiska vågor litium niobat interdigitala givare lyft-off våt etsning
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