JoVE Journal
Engineering
Engineering
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Summary
Please note that all translations are automatically generated.
本工作为纳米结构α石英悬臂在绝缘硅(SOI)技术基板上的微压造提供了详细的协议,从石英薄膜的表观生长开始,采用浸涂法,然后通过纳米印花石刻技术对薄膜进行纳米结构处理。