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Journal / Engineering / 실리카 초고 품질 팩터 Microresonators의…
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실리카 초고 품질 팩터 Microresonators의 제작
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실리카 초고 품질 팩터 Microresonators의 제작

Article DOI: 10.3791/4164-v • 07:51 min • July 2nd, 2012
July 2nd, 2012 •
1, 1,2
1Department of Chemical Engineering and Materials Science, University of Southern California, 2Department of Electrical Engineering-Electrophysics, University of Southern California

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우리는 자유 서 microspheres 및 온칩 microtoroids 포함한 실리카 공진 충치를 조작하는 이산화탄소 레이저 reflow 기법의 사용을 설명합니다. reflow 메서드는 두 장치 사이 긴 광자 수명 있도록, 표면 결함을 제거합니다. 그 결과 디바이스는 통신에서 biodetection에 이르기까지 애플 리케이션을 가능하게, 초고 품질 요인이 있습니다.

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재료 과학 문제 65 화학 공학 물리 Electrophysics 바이오 센서 장치 제조 microcavity 광학 공진기
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