JoVE Journal
Engineering
Engineering
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Summary
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我们描述了实验的背景气体的存在下,在纳秒的脉冲激光沉积(PLD)方法来沉积纳米结构的氧化物薄膜。通过使用此方法的掺Al的ZnO(AZO)膜,从紧凑型分层结构为纳米树森林,可以沉积。