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Micro-Mauerwerk für 3D-Additive Mikroproduktion

Article DOI: 10.3791/51974-v • 08:45 min • August 1st, 2014
August 1st, 2014 •
1, 1
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

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Dieses Papier stellt eine 3D-additive Mikrofertigung Strategie (sog. "Mikromauerwerk ') für die flexible Fertigung von mikroelektromechanisches System (MEMS)-Strukturen und Geräte. Dieser Ansatz beinhaltet Transferdruck-basierte Montage von Mikro / nanoskaligen Materialien in Verbindung mit Rapid Thermal Annealing-fähigen Material Verbindungstechniken.

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Physik Ausgabe 90 Micro-Mauerwerk Mikromontage Transferdruck Textilkleber additive Fertigung gedruckt Prozesse Mikrofabrikation Tinten mikroelektromechanisches System (MEMS)
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