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Journal / Engineering / 광학 가포 전환을 통해 패터닝 - 제조 및…
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광학 가포 전환을 통해 패터닝 - 제조 및 특성

Article DOI: 10.3791/52449-v • 08:19 min • December 11th, 2014
December 11th, 2014 •
1, 2, 1
1Department of Electrical and Computer Engineering, The University of Utah, 2Department of Chemistry, The University of Wisconsin-Madison

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물리학 이슈 (94) 광학 나노 물질 제조 나노 리소그래피 광학 나노 리소그래피 서브 파장 회절
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