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Síntese e Caracterização de alta c-eixo ZnO Thin Film por Plasma aprimorado Chemical Vapor Deposition Sistema e sua Aplicação Photodetector UV
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Síntese e Caracterização de alta c-eixo ZnO Thin Film por Plasma aprimorado Chemical Vapor Deposition Sistema e sua Aplicação Photodetector UV

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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Engenharia Edição 104 ZnO filme fino, deposição de vapor químico de plasma reforçada dietilzinco (DEZn) sensor Pt eletrodo interdigitada Conexão condutora fotodetector UV
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