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Journal / Engineering / 欧姆接触制造用聚焦离子束技术和电气特性的半导体层的纳米结构…
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欧姆接触制造用聚焦离子束技术和电气特性的半导体层的纳米结构

Article DOI: 10.3791/53200-v • 08:12 min • December 5th, 2015
December 5th, 2015 •
1, 2, 2, 2
1Graduate Institute of Applied Science and Technology, National Taiwan University of Science and Technology, 2Department of Electronic Engineering, National Taiwan University of Science and Technology

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工程，第106，聚焦离子束（FIB），欧姆接触，层半导体，钼硒（摩西
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