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Journal / Engineering / 半導体技術との互換性低温カーボンナノチューブ垂直相互接続の作製…
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Engineering

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JoVE Journal Engineering
半導体技術との互換性低温カーボンナノチューブ垂直相互接続の作製
Light-Induced In Situ Transmission Electron Microscopy for Observation of the Liquid-Soft Matter Interaction
Journal (Engineering)
Light-Induced In Situ Transmission Electron Microscopy for Observation of the Liquid-Soft Matter Interaction
Carrier Lifetime Measurements in Semiconductors through the Microwave Photoconductivity Decay Method
Journal (Engineering)
Carrier Lifetime Measurements in Semiconductors through the Microwave Photoconductivity Decay Method
 
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半導体技術との互換性低温カーボンナノチューブ垂直相互接続の作製

Article DOI: 10.3791/53260-v • 09:20 min • December 7th, 2015
December 7th, 2015 •
1, 1
1Department of Microelectronics, Delft University of Technology

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工学、106号、カーボンナノチューブ、化学蒸着、相互接続、半導体製造、触媒、集積回路、走査電子顕微鏡、ラマン分光法、電気特性評価
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