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Lys Enhanced Flussyre Acid Passivering
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Lys Enhanced Flussyre Acid Passivering: En følsom teknik til påvisning af Bulk Silicon Fejl

Article DOI: 10.3791/53614-v • 09:15 min • January 4th, 2016
January 4th, 2016 •
1
1Research School of Engineering, Australian National University

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En RT væskeoverfladen passivering teknik til at undersøge rekombinationsaktivitet af bulk silicium defekter er beskrevet. For teknikken at være en succes, er tre kritiske trin kræves: (i) kemisk rensning og ætsning af silicium, (ii) neddypning af silicium i 15% flussyre og (iii) belysning til 1 min.

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Engineering Bulk levetid defekter flussyre belysning passivering photoconductance rekombination.
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