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Engineering

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JoVE Journal Engineering
Omfattende Karakterisering av Extended Defekter i halvledermaterialer av en scanning elektronmikroskop
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Omfattende Karakterisering av Extended Defekter i halvledermaterialer av en scanning elektronmikroskop

Article DOI: 10.3791/53872-v • 11:14 min • May 28th, 2016
May 28th, 2016 •
1, 1, 1, 1, 2, 2, 1
1Institute of Applied Physics, Semiconductor Physics, Technische Universität Dresden, 2Institut für Strukturphysik, Technische Universität Dresden

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Engineering utgave 111 Scanning elektronmikroskop (SEM) silisium katodeluminisens (CL) elektronstråleinduserte strøm (EBIC) krysskorrelasjon elektron-tilbakespredning diffraksjon (ccEBSD) dislokasjoner korngrensene D-linje luminescens
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