Waiting
Login processing...

Trial ends in Request Full Access Tell Your Colleague About Jove
JoVE Journal
Chemistry

A subscription to JoVE is required to view this content.

锗通过原子层沉积钙钛矿型钛酸锶的外延生长
 
Click here for the English version

锗通过原子层沉积钙钛矿型钛酸锶的外延生长

Article DOI: 10.3791/54268-v 09:45 min July 26th, 2016
July 26th, 2016

Chapters

Summary

Please note that all translations are automatically generated.

Click here for the English version.

这个工作详细直接结晶的SrTiO 3的锗基板通过原子层沉积的生长和表征的程序。该过程示出了一个全化学生长方法来单片集成氧化物到半导体金属氧化物半导体器件的能力。

Tags

化学,第113,原子层沉积,钙钛矿,钛酸锶,钛酸锶
Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter