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Epitaksial dyrkning af Perovskite strontiumtitanat på Germanium via Atomic Layer Deposition
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Epitaksial dyrkning af Perovskite strontiumtitanat på Germanium via Atomic Layer Deposition

Article DOI: 10.3791/54268-v • 09:45 min • July 26th, 2016
July 26th, 2016 •
1, 1, 1, 1
1McKetta Department of Chemical Engineering, The University of Texas at Austin

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Dette arbejde beskriver procedurerne for vækst og karakterisering af krystallinsk SrTiO 3 direkte på germanium substrater af atomare lag deposition. Proceduren illustrerer evne en all-kemisk metode vækst at integrere oxider monolitisk på halvledere til metal-oxid halvleder-enheder.

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Kemi Atomic lag deposition perovskit strontium titanate SrTiO Germanium epitaksi krystallinsk oxid
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