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Aerosol-bijgewoonde Chemical Vapor Deposition van metaaloxide structuren
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Aerosol-bijgewoonde Chemical Vapor Deposition van metaaloxide structuren: zinkoxide staven

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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In kolomvorm zinkoxide structuren in de vorm van staven worden gesynthetiseerd via aerosol-bijgewoonde chemische damp afzetting zonder het gebruik van vooraf gedeponeerde katalysator-zaad deeltjes. Deze methode is schaalbaar en compatibel met verschillende ondergronden op basis van silicium, kwarts of polymeren.

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Chemie kwestie 127 zinkoxide in kolomvorm structuren staven AACVD niet-gekatalyseerde groei damp-solid mechanisme
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