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JoVE Journal Chemistry
Aerosol-assistert kjemiske damp deponering av metalloksid strukturer
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Aerosol-assistert kjemiske damp deponering av metalloksid strukturer: sinkoksid stenger

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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Kolonne sinkoksid strukturer i form av stenger er synthesized via aerosol-assistert kjemiske damp deponering uten bruk av pre avsatt catalyst-frø partikler. Denne metoden er skalerbart og kompatibelt med ulike underlag basert på silisium, kvarts eller polymerer.

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Kjemi problemet 127 sink oksid kolonne strukturer stenger AACVD ikke-katalysert vekst damp-solid mekanisme
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