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Design og karakterisering metodikk for effektiv bredt spekter Tunable MEMS filtre
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Design og karakterisering metodikk for effektiv bredt spekter Tunable MEMS filtre

Article DOI: 10.3791/56371-v • 15:25 min • February 4th, 2018
February 4th, 2018 •
1
1Department of Electrical and Electronic Engineering, Harran University

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En protokoll for en fast-fast bredde design bruker en laser Doppler vibrometer (LDV), inkludert måling av frekvens tuning, endring av tuning evne, og unngå enhetsfeil og statisk friksjon, presenteres. Overlegenhet metoden LDV over nettverk analyserer er demonstrert på grunn av sin høyere modus evne.

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Engineering problemet 132 MEMS systemer (MEMS) filtre complementary metal oxide semiconductor (CMOS)-MEMS microresonator rekke aktive frekvens tuning høy-modus resonans Joule oppvarming statisk friksjon laser Doppler vibrometer ( LDV)
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