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Journal / Engineering / 高周波マグネトロンスパッタ リングによる GdBa2Cu3O7−δ/チタン酸ストロンチウム3…
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JoVE Journal Engineering
高周波マグネトロンスパッタ リングによる GdBa2Cu3O7−δ/チタン酸ストロンチウム3 (STO) 単結晶基板上 La0.67Sr0.33MnO3準二層フィルム
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高周波マグネトロンスパッタ リングによる GdBa2Cu3O7−δ/チタン酸ストロンチウム3 (STO) 単結晶基板上 La0.67Sr0.33MnO3準二層フィルム

Article DOI: 10.3791/58069-v • 06:49 min • April 12th, 2019
April 12th, 2019 •
1,2, 1,2, 1, 2, 2, 2, 1, 1,3, 1,4, 3, 3
1Department of Physics, Mathematics, Shanghai Key Laboratory of Materials Protection and Advanced Materials in Electric Power, Shanghai University of Electric Power, 2Key Laboratory of Artificial Structure and Quantum Control, Ministry of Education, Department of Physics, Shanghai Jiao Tong University, 3Shanghai Institute of Space Power-sources, 4Shanghai Key Laboratory of High Temperature Superconductors, Shanghai University

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ここでは、LSMO ナノ粒子を成長するためのプロトコルを提案する、無線周波数 (RF) による単結晶基板 (001) チタン酸ストロンチウム3 (STO) (Gd) BCO 膜のスパッタします。

Tags

工問題 146 LSMO/(Gd) BCO 薄膜、スパッタ、超伝導、強磁性、ナノ粒子、準二層フィルム構造
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