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Journal / Engineering / 等离子体辅助分子束外延法制备的锌极性…
JoVE Journal
Engineering

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JoVE Journal Engineering
等离子体辅助分子束外延法制备的锌极性 BeMgZnO/氧化锌异质结构肖特基二极管的制备
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等离子体辅助分子束外延法制备的锌极性 BeMgZnO/氧化锌异质结构肖特基二极管的制备

Article DOI: 10.3791/58113-v • 14:16 min • October 23rd, 2018
October 23rd, 2018 •
1, 1, 1, 1, 1, 1
1Department of Electrical and Computer Engineering, Virginia Commonwealth University

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实现高品质肖特基接触是异质结构场效应晶体管 (HFETs) 实现高效栅极调制的必要条件。本文介绍了基于 GaN 模板的等离子体辅助分子束外延生长的高浓度二维电子气体 (2DEG) 的锌极性 BeMgZnO/氧化锌异质结构中肖特基二极管的制备方法和特点。

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工程 问题 140 分子束外延 (MBE) 氧化锌 BeMgZnO 二维电子气体 (2DEG) 异质结构场效应晶体管 (HFETs) Ag 肖特基二极管
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