Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing

Oxide materials show many exotic properties that can be controlled by tuning the oxygen content. Here, we demonstrate the tuning of oxygen content in oxides by varying the pulsed laser deposition parameters and by performing postannealing. As an example, electronic properties of SrTiO₃-based heterostructures are tuned by growth modifications and annealing.