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Journal / Engineering / 자외선 발광 다이오드용 나노 패턴 사파이어 기판에 대한 알N 필름의 그래핀 지원 준 반…
JoVE Journal
Engineering

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JoVE Journal Engineering
자외선 발광 다이오드용 나노 패턴 사파이어 기판에 대한 알N 필름의 그래핀 지원 준 반 데르 발스 에피택시
Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Journal (Engineering)
Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
Journal (Engineering)
Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
 
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자외선 발광 다이오드용 나노 패턴 사파이어 기판에 대한 알N 필름의 그래핀 지원 준 반 데르 발스 에피택시

Article DOI: 10.3791/60167-v • 07:00 min • June 25th, 2020
June 25th, 2020 •
*1,2, *3, 1,2, 1,2, 2,4, 1,2, 5, 1,2
1State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Science, 3Center for Nanochemistry (CNC), Beijing National Laboratory for Molecular Science, College of Chemistry and Molecular Engineering, Peking University, 4State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, 5Electron Microscopy Laboratory, School of Physics, Peking University
* These authors contributed equally

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나노 패턴 사파이어 기판에 고품질 AlN 필름의 그래 핀 지원 성장을위한 프로토콜이 제시된다.

Tags

공학 문제 160 그래 핀 MOCVD AlN 자외선 발광 다이오드 반 데르 발스 epitaxy 나노 패턴 사파이어 기판
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