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JoVE Journal
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通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造
 
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通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造

Article DOI: 10.3791/60648-v 07:23 min February 5th, 2020
February 5th, 2020

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Summary

Please note that all translations are automatically generated.

Click here for the English version.

通过提升光刻、纳米深度反应离子蚀刻和室温等离子体,演示了纳米高通道的制造,通过提升光刻、纳米深度反应离子蚀刻和室温等离子体,将表面声波驱动装置集成在硅基硅基硅基上单晶尼欧比锂的表面激活多层粘接,这一工艺同样适用于将氮化锂与氧化物粘接。

Tags

工程, 问题 156, 电能,纳米流体, 纳米制造, 表面声波, 室温粘接, 锂牛油, 等离子体活性粘接
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