Materials
Name | Company | Catalog Number | Comments |
Lumerical FDTD | Lumerical | ||
Silicon wafer | IDB technologies | Single sided polished | |
Plassys 450 MEB evaporator | Plassys Bestek | ||
VM651 Primer | Dupont | ||
PI2545 | Dupont | ||
Methyl Isobutyl Ketone | Sigma-Aldrich | ||
Isopropanol | Sigma-Aldrich | ||
Plasmaprep5 barrel Asher | Gala Instrumente | ||
VB6 UHR EWF electron beam writer | Vistec | ||
Tanner L-Edit | Tanner Inc. | ||
Layout Beamer | GenISys Inc. | ||
Polymethyl methacrylate (PMMA) | Sigma-Aldrich | 293261 Sigma-Aldrich | |
IFV 66v/s FTIR | Bruker | ||
Pike 30spec reflection unit | Pike Technologies | ||
Hg arc lamp | Bruker | ||
Au mirror | Thor Labs | PF05-03-M01 | |
Leica INM20 Optical Microscope | Leica microsystems | ||
6 mm Mylar Beamsplitter | Bruker |
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